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超精密原位纳米压痕/刻划测试技术的研究

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Funded by : 吉林省科技发展计划（青年基金）项目

Pre One : 面向光电制造业的超精密刀具伺服驱动技术

Next One : 微纳米尺度复杂表面切削加工技术及装备
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