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微纳米尺度复杂表面切削加工技术及装备

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Funded by : 科技部国际合作专项项目

Pre One : 超精密原位纳米压痕/刻划测试技术的研究

Next One : 压电驱动型跨尺度原位纳米压痕/刻划测试新技术的研究
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