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Zhifu Yin,Liping Qi,Helin Zou*,A novel 2D silicon nano-mold fabrication technique by inclined-deposition and Ar etching over 4 inch large area,Scientific reports,2016,6:18921~18921

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Pre One : Zhifu Yin,E Cheng,Helin Zou*,A novel hybrid patterning technique for micro and nanochannel fabrication by integrating hot embossing and inverse UV photolithography,Lab on a Chip,2015,14(9):1614~1621